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Microsensors, MEMS and Smart Devices, by Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim
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Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle.
Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices.
Features include:
* Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods.
* Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines.
* Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin.
* An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology.
* Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field.
Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field.
- Sales Rank: #1853442 in Books
- Published on: 2001-12-15
- Original language: English
- Number of items: 1
- Dimensions: 9.67" h x 1.40" w x 6.83" l, 2.45 pounds
- Binding: Hardcover
- 528 pages
From the Back Cover
Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle.
Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices.
Features include:
* Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods.
* Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines.
* Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin.
* An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology.
* Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field.
Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field.
Most helpful customer reviews
1 of 1 people found the following review helpful.
Excellent guidebook on microsensors and MEMS sensors
By Michael A. Duvernois
There are a fair number of MEMS books available now, and I've commented on a few of them. This one is well focused though on sensors, broadly interpreted. Use amazon's search inside this book to thumb through it and find a couple of sections of particular interest. There's a lot of information in here, and the references are especially good for taking you to additional and, if needed, primary literature.
0 of 0 people found the following review helpful.
Just plain sloppy!
By Amazon Customer
I am extremely disappointed. This book is poorly written and full of mistakes. While this book is not a complete waste of time and money, it is very close. I can only hope that the huge number of mistakes and typographical errors can be fixed in future editions.
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